JPH03110833U - - Google Patents
Info
- Publication number
- JPH03110833U JPH03110833U JP2017790U JP2017790U JPH03110833U JP H03110833 U JPH03110833 U JP H03110833U JP 2017790 U JP2017790 U JP 2017790U JP 2017790 U JP2017790 U JP 2017790U JP H03110833 U JPH03110833 U JP H03110833U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- light
- opening
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020177U JP2519187Y2 (ja) | 1990-02-27 | 1990-02-27 | 光照射型熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020177U JP2519187Y2 (ja) | 1990-02-27 | 1990-02-27 | 光照射型熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03110833U true JPH03110833U (en]) | 1991-11-13 |
| JP2519187Y2 JP2519187Y2 (ja) | 1996-12-04 |
Family
ID=31523273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990020177U Expired - Lifetime JP2519187Y2 (ja) | 1990-02-27 | 1990-02-27 | 光照射型熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519187Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150396A (ja) * | 1998-11-16 | 2000-05-30 | Sakaguchi Dennetsu Kk | 熱放射リフレクター |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6173324A (ja) * | 1984-09-17 | 1986-04-15 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
-
1990
- 1990-02-27 JP JP1990020177U patent/JP2519187Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6173324A (ja) * | 1984-09-17 | 1986-04-15 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150396A (ja) * | 1998-11-16 | 2000-05-30 | Sakaguchi Dennetsu Kk | 熱放射リフレクター |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2519187Y2 (ja) | 1996-12-04 |